Semiconductor integrated ciruit which properly executes an operational test of a circuit under test in the semiconductor integrated circuit

ABSTRACT

A semiconductor integrated circuit includes a circuit under test coupled to the logic circuit to receive a plurality internal test signals and a delay time measurement terminal from which a delay time measurement signal is output. The delay time measurement signal is turned in accordance with a transition of one of the internal test signal. The semiconductor integrated circuit further includes a current generator coupled to the delay time measurement terminal, and still further includes a plurality of delay time measurement transistors coupled to the delay time measurement terminal. The delay time measurement transistors have a plurality of control electrodes coupled to the logic circuit to receive the internal test signals. Alternatively, the semiconductor integrated circuit may include an input switching circuit coupled between the logic circuit and the CUT and a pseudo test terminal coupled to the CUT and the logic circuit.

CROSS-REFERENCE TO RELATED APPLICATIONS

This is a continuation-in-part (CIP) of, and a claim of priority is madeto, U.S. non-provisional patent application Ser. No. 10/990,430, filedNov. 18, 2004, the entire contents of which are incorporated herein byreference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a semiconductor integrated circuit thatexecutes an operational test of itself, in particular, to asemiconductor integrated circuit that includes different integratedcircuit blocks mixed therein and which executes the operational testwith respect to one of the mixed different integrated circuits. This isa counterpart of and claims priority to Japanese Patent Application No.2004-109086 filed on Apr. 1, 2004, which is herein incorporated byreference.

2. Description of the Related Art

A mixed circuit which includes a logic circuit and a memory circuit (forexample, a Dynamic Random Access Memory (DRAM) circuit), or a systemLarge Scale Integrated (hereinafter referred to as “LSI”) circuit whichincludes different integrated circuits such as a DRAM, a Static RandomAccess Memory (SRAM), a Read only Memory (ROM) and a central ProcessingUnit (CPU) has been developed as a result of improvements made in designand manufacturing techniques.

The above-mentioned circuit may include an internal circuit that isexternally accessed through another circuit during a normal operationalmode of the circuit. FIG. 1 is a block diagram for describing a logicmemory mixed circuit 700A of the related art. The logic memory mixedcircuit 700A includes a memory circuit 710A that is coupled to externalinput-output pads 730 through a logic circuit 720A. That is, an externalinput signal is initially input to the logic circuit 720A and then aninternal input signal generated by the logic circuit 720A is transferredto an internal input terminal of the memory circuit 710A. Likewise, aninternal output signal generated by the memory circuit 710A istransferred to the external input-output pad 730 through the logiccircuit 720A. When an operational test is executed only against thememory circuit 710A, an external test signal received by the externalinput-output pad 730 needs to be directly provided to the memory circuit710A.

FIG. 2 is a circuit block diagram for describing a semiconductorintegrated circuit 700B of another related art. The semiconductorintegrated circuit 700B includes a logic circuit 720B coupled betweenexternal input pads 731 through 733 and internal input terminals 711through 713 of a memory circuit 710B. The logic circuit 720B includes aplurality of sub-logic circuits 721 coupled with each other byinterconnections 722. In order to provide external test signals eTCK,eTWE and eTRE directly to the memory circuit 710B, the logic circuit720B includes selection circuits. The external test signals can bedirectly provided to the memory circuit 710B without passing through thesub-logic circuits 721 of the logic circuit 720B by switching theselection circuits.

However, in the semiconductor integrated circuit 700B as shown in FIG.2, the number of the sub-logic circuits 721 and the length of theinterconnections 722 between the external input pads 731 through 733 andthe internal input terminals 711 through 713 are different than eachother. For example, the number of the sub-logic circuits 721 between theexternal input pads 731 and the internal input terminals 711 isdifferent than the number of sub-logic circuits 721 between the externalinput pads 732 and the internal input terminals 712. Also, the length ofthe interconnection between the external input pads 731 and the internalinput terminals 711 is different than the length of the interconnectionbetween the external input pads 732 and the internal input terminals712. Thus, delay times caused by the logic circuit 720B may be differentamong the external test signals eTCK, eTWE and eTRE. Therefore, eventhough the external test signals eTCK, eTWE and eTRE are input to theexternal input pads 731 through 733 in accordance with a desired inputtiming of signals in the memory circuit 710B, internal test signalsiTCK, iTWE and iTRE generated by the logic circuit 720B may not beprovided to the memory circuit 710B in accordance with the desired inputof signals in the memory circuit 710B. That is, there are differentdelay times among the internal test signals iTCK, iTWE and iTRE. As aresult, the operational test may not be properly executed in the memorycircuit 710B of the semiconductor integrated circuit 700B. In order tosuppress the disadvantage with respect to the operational test, theexternal test signals eTCK, eTWE and eTRE may be input to the externalinput pads 731 through 733 previously with the different delay times ofthe internal test signals iTCK, iTWE and iTRE. Therefore, it isnecessary that the different delay times of the internal test signalsiTCK, iTWE and iTRE are exactly measured to improve the reliability ofthe operational test.

The following first and second measuring techniques for the delay timesof the external test signals are disclosed.

The delay times of the external test signals are directly measured usinga needle pico-probe and an oscilloscope in the first measuringtechnique. In this technique, after the needle pico-probes contact theexternal input pads 731 through 733 and the internal input terminals 711through 713, voltage waveforms of the external input pads 731 through733 and the internal input terminals 711 through 713 are detected by theoscilloscope. Then, the delay times of the external test signals can beobtained based on the voltage waveforms.

Also, the second measuring technique is described in a Patent Document 1(Japanese Patent Publication Laid-open No. 2001-153930), in particular,in the paragraph [0036] through [0042] of the Document 1. In the secondmeasuring technique, interconnections are constructed so that theexternal test signals input to test signal input pads can be output fromtest signal output pads through an under-test circuit (for example, thememory circuit 710B) as test result signals. Then, the delay times ofthe test result signals are measured. As a result, the delay times ofthe external test signals can be obtained.

However, in the first measuring technique, an operator needs to manuallymake the needle pico-probe contact the external input pads 731 through733 and the internal input terminals 711 through 713, and it takes along time for the operational test to be executed. Furthermore, it ishard for the operator to execute the operational test under a conditionof high temperature. Therefore, the measurement results may not bealways correct. Also, in the second measuring technique, a large-scaledtest circuit (the test control circuit 5 described in the Document 1)and test interconnections (the test bus 2 described in the Document 1)need to be used for the operational test. Therefore, the size of thesemiconductor integrated circuit becomes large.

Meanwhile, consumption current of the semiconductor integrated circuitmay be measured in the operational test. For example, the followingconsumption current measuring technique is disclosed as the related artin a Patent Document 2 (Japanese Patent Publication Laid-open No.2003-256495). In this measuring technique, the consumption current ofthe semiconductor integrated circuit is detected using an RTradioimmunoassary test and test patterns. However, the consumptioncurrent only in the memory circuit 710B as described in FIG. 1 may notbe detected by the consumption current measuring technique described inthe Document 2.

SUMMARY OF THE INVENTION

An object of the present invention is to exactly measure a differencebetween the different delay times of the internal test signals and toexactly measure the consumption current only in the under-test circuit.

According to an aspect of the present invention, for achieving theabove-mentioned object, there is provided a semiconductor integratedcircuit which includes a plurality of external input terminals whichreceives a plurality of external test signals and includes a logiccircuit which is coupled to the external input terminals. The logiccircuit outputs a plurality of internal test signals based on theexternal test signals. The semiconductor integrated circuit furtherincludes a circuit under test which is coupled to the logic circuit toreceive the internal test signals, and includes a delay time measurementterminal from which a delay time measurement signal is output. The delaytime measurement signal is turned in accordance with a transition of oneof the internal test signal. The semiconductor integrated circuit stillfurther includes a current generator which is coupled between a firstelectrical source terminal and the delay time measurement terminal, andincludes a plurality of delay time measurement transistors which arecoupled in parallel between the delay time measurement terminal and asecond electrical source terminal. The delay time measurementtransistors have a plurality of control electrodes which are coupled tothe logic circuit to receive the internal test signals.

According to another aspect of the present invention, for achieving theabove-mentioned object, there is provided a semiconductor integratedcircuit, operable normal operational mode and a test mode, whichincludes a plurality of external input terminals and a logic circuitcoupled to the external input terminals. The logic circuit receives aplurality of external signals through the external input terminals tooutput a plurality of internal input signals. The semiconductorintegrated circuit further includes a circuit under test (CUT) coupledto the logic circuit to receive the internal input signals and includesan input switching circuit coupled between the logic circuit and theCUT. The CUT generates an internal output signal for the logic circuitwhen the semiconductor integrated circuit operates in the normaloperational mode. The input switching circuit prohibits the CUT fromreceiving the internal input signals when the semiconductor integratedcircuit operates in the test mode. The semiconductor integrated circuitstill further includes a pseudo test terminal coupled to the CUT and thelogic circuit. A pseudo test signal is input to the logic circuitthrough the pseudo test terminal when the CUT is prohibited fromreceiving the internal input signals.

According to the other aspect of the present invention, for achieving the above-mentioned object, there is provided a semiconductor integratedcircuit, operable normal operational mode and a test mode, whichincludes a plurality of external input terminals and a logic circuitcoupled to the external input terminals. The logic circuit receives aplurality of external signals through the external input terminals tooutput a plurality of internal input signals. The internal signalsinclude a data input signal. The semiconductor integrated circuitfurther includes a circuit under test (CUT) coupled to the logic circuitto receive the internal input signals and includes an input switchingcircuit coupled between the logic circuit and the CUT. The CUT generatesan internal output signal for the logic circuit when the semiconductorintegrated circuit operates in the normal operational mode. The inputswitching circuit prohibits the CUT from receiving the internal inputsignals when the semiconductor integrated circuit operates in the testmode. The semiconductor integrated circuit still further includes apseudo test signal generating circuit coupled to the logic circuit toreceive the data input signal. The pseudo test signal generating circuitprovides a pseudo test signal to the logic circuit based on the datainput signal when the CUT is prohibited from receiving the internalinput signals.

The above and further aspects and novel features of the invention willmore fully appear from the following detailed description, appendedclaims and the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a block diagram for describing a logic memory mixed circuit700A of the related art.

FIG. 2 is a circuit block diagram for describing a semiconductorintegrated circuit 700B of another related art.

FIG. 3 is a schematic circuit diagram for describing a semiconductorintegrated circuit according to a first preferred embodiment of thepresent invention.

FIGS. 4A through 4G are signal waveform diagrams for describing theoperation of the semiconductor integrated circuit in FIG. 3.

FIG. 5 is a schematic circuit diagram for describing a semiconductorintegrated circuit according to a second preferred embodiment of thepresent invention.

FIGS. 6A through 6G are signal waveform diagrams for describing theoperation of the semiconductor integrated circuit in FIG. 5.

FIG. 7 is a schematic circuit diagram for describing a semiconductorintegrated circuit according to a third preferred embodiment of thepresent invention.

FIGS. 8A through 8H are signal waveform diagrams for describing theoperation of the semiconductor integrated circuit in FIG. 7.

FIG. 9 is a schematic circuit diagram for describing a semiconductorintegrated circuit according to a fourth preferred embodiment of thepresent invention.

FIGS. 10A and 10B are schematic circuit diagrams for describing theinput switching circuit and the output switching circuit of the memorycircuit in the semiconductor integrated circuit in FIG. 9.

FIG. 11 is a schematic circuit diagram for describing a semiconductorintegrated circuit according to a fifth preferred embodiment of thepresent invention.

FIG. 12 is a schematic circuit diagram for describing the pseudo testsignal switching circuit in the semiconductor integrated circuit in FIG.11.

FIG. 13 is a schematic circuit diagram for describing a semiconductorintegrated circuit according to a sixth preferred embodiment of thepresent invention.

FIG. 14 is a schematic circuit diagram for describing the pseudo testsignal generating circuit in the semiconductor integrated circuit inFIG. 13.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

Embodiments of the present invention will be described hereinafter withreferences to the accompanying drawings. The drawings used for thisdescription illustrate major characteristic parts of embodiments inorder that the present invention will be easily understood. However, theinvention is not limited by these drawings.

FIG. 3 is a schematic circuit diagram for describing a semiconductorintegrated circuit 100 according to a first preferred embodiment of thepresent invention. The semiconductor integrated circuit 100 includes amemory circuit 110, a logic circuit 120, a plurality of external inputterminals 131 through 133, a delay time measurement circuit 140 and adelay time measurement terminal 130. In this example, the memory circuit110 is a circuit under test (hereinafter referred as to a “CUT”).

The memory circuit 110 includes a plurality of internal input terminals111 through 113 that respectively receive internal input signals. Inthis example, these internal input signals include an internal clocksignal iCK, an internal write enable signal iWE and an internal readenable signal iRE.

The logic circuit 120 includes a peripheral circuit such as aninput-output circuit with respect to the memory circuit 110. The logiccircuit 120 outputs the internal input signals based on a plurality ofexternal input signals that have been input to the external inputterminals 131 through 133.

Hereupon, during a normal operational mode of the semiconductorintegrated circuit 100, the external input signals include an externalclock signal eCK, an external write enable signal eWE and an externalread enable signal eRE. That is, the logic circuit 120 generates theinternal clock signal iCK, the internal write enable signal iWE and theinternal read enable signal iRE based on the external clock signal eCK,the external write enable signal eWE and the external read enable signaleRE for the internal input terminals 131 through 133 of the memorycircuit 110.

On the other hand, during an operational test mode of the semiconductorintegrated circuit 100, the logic circuit 120 receives a plurality ofexternal input test signals and then provides them straight to theinternal input terminals 131 through 133 of the memory circuit 110 as aplurality of internal input test signals. In this example, the externalinput test signals include an external test clock signal eTCK, anexternal test write enable signal eTWE and an external test read enablesignal eTRE, and the internal input test signals include an internaltest clock signal iTCK, an internal test write enable signal iTWE and aninternal test read enable signal iTRE. That is, the logic circuit 120receives the external test clock signal eTCK, the external test writeenable signal eTWE and the external test read enable signal eTRE andthen provides them straight to the internal input terminals 131 through133 of the memory circuit 110 as the internal test clock signal iTCK,the internal test write enable signal iTWE and the internal test readenable signal iTRE. Also, delay times between the internal input testsignals and the external input test signals may be different than oneanother. For example, the clock delay time CKDT between the internaltest clock signal iTCK and the external test clock signal eTCK isdifferent than the write enable delay time WEDT between the internaltest write enable signal iTWE and the external test write enable signaleTWE and the read enable delay time REDT between the internal test readenable signal iTRE and the external test read enable signal eTRE, andthe write enable delay time WEDT is different than the read enable delaytime REDT.

The delay time measurement circuit 140 detects the clock delay timeCKDT, the write enable delay time WEDT and the read enable delay timeREDT. The delay time measurement circuit 140 is coupled between a firstelectrical source terminal T1 and a second electrical source terminal T2and includes a plurality of delay time measurement NMOS transistors 141through 143 and a current generator 144. In this example, the firstelectrical source terminal T1 receives a power supply voltage Vcc andthe second electrical source terminal T2 receives a ground voltage Vss.The clock delay time measurement NMOS transistor 141 includes a sourceelectrode coupled to the second electrical source terminal T2, a drainelectrode coupled to the delay time measurement terminal 130, and a gateelectrode coupled to the internal input terminal 111 so as to receivethe internal test clock signal iTCK. The write enable delay timemeasurement NMOS transistor 142 includes a source electrode coupled tothe second electrical source terminal T2, a drain electrode coupled tothe delay time measurement terminal 130, and a gate electrode coupled tothe internal input terminal 112 so as to receive the internal test writeenable signal iTWE. The read enable delay time measurement NMOStransistor 143 includes a source electrode coupled to the secondelectrical source terminal T2, a drain electrode coupled to the delaytime measurement terminal 130, and a gate electrode coupled to theinternal input terminal 113 so as to receive the internal test readenable signal iTRE. The current generator 144 is coupled between thefirst electrical source terminal T1 and the delay time measurementterminal 130. The current generator 144 provides a pull-up voltage tothe delay time measurement terminal 130 based on the power supplyvoltage Vcc. The current generator 144 may be outside of thesemiconductor integrated circuit 100. As stated above, the delay timemeasurement NMOS transistors 141 through 143 respectively have opendrain electrodes and are coupled in parallel with one another betweenthe delay time measurement terminal 130 and the second electrical sourceterminal T2. That is, the delay time measurement NMOS transistors 141through 143 constitute a wired NOR circuit in order to pull up anelectrical potential of the delay time measurement terminal 130. Theelectrical potential of the delay time measurement terminal 130 isoutput from the delay time measurement terminal 130 as a delay timemeasurement signal Sdt.

The operation of the semiconductor integrated circuit 100 according tothe first preferred embodiment of the present invention is describedbelow. FIGS. 4A through 4G are signal waveform diagrams for describingthe operation of the semiconductor integrated circuit 100 in FIG. 3.FIG. 4A represents a waveform of the external test clock signal eTCK,FIG. 4B represents a waveform of the internal test clock signal iTCK,FIG. 4C represents a waveform of the external test write enable signalTWE, FIG. 4D represents a waveform of the internal test write enablesignal iTWE, FIG. 4E represents a waveform of the external test readenable signal TRE, FIG. 4F represents a waveform of the internal testread enable signal iTRE, and FIG. 4G represents a waveform of the delaytime measurement signal Sdt.

First of all, when the external test clock signal eTCK, the externaltest write enable signal eTWE and the external test read enable signaleTRE are kept at a “Low” level (hereinafter referred to as “L” level) asshown in FIGS. 4A, 4C and 4E, the internal test clock signal iTCK, theinternal test write enable signal iTWE and the internal test read enablesignal iTRE are also kept at the “L” level as shown in FIGS. 4B, 4D and4F. That is, the when electrical potentials of the external inputterminals 131 through 133 are kept at the “L” level, electricalpotentials of the internal input terminal 111 through 113. Accordingly,the gate electrodes of the delay time measurement NMOS transistors 141through 143 respectively receive the internal test signals that are keptat the “L” level. Also, the source electrodes of the delay timemeasurement NMOS transistors 141 through 143 respectively receive theground voltage Vss. Therefore, the delay time measurement NMOStransistors 141 through 143 are all turned OFF. On such an occasion asthis, the electrical potential of the delay time measurement terminal130 is pulled-up by the current generator 144. That is, the delay timemeasurement signal Sdt is kept at the “High” level (hereinafter referredto as “H” level) as shown in FIG. 4G.

Next, the external test clock signal eTCK is turned to the “H” levelwhile the external test write enable signal eTWE and the external testread enable signal eTRE are kept at the “L” level as shown in FIG. 4A.Then, the internal test clock signal iTCK is turned to the “H” levelbehind the rising edge of the external test clock signal eTCK by a clockrising delay time Tck1 as shown in FIG. 4B. Therefore, the clock delaytime measurement NMOS transistor 141 is turned ON, and then theelectrical potential of the delay time measurement terminal 130 isturned to the “L” level as shown in FIG. 4G. That is, the electricalpotential of the delay time measurement terminal 130 is turned to the“L” level behind the rising edge of the external test clock signal eTCKby a first measurement delay time Tmd1 as shown in FIG. 4G. Then, theexternal test clock signal eTCK is turned to the “L” level behind therising edge of the external test clock signal eTCK by a firstpredetermined time Ta as shown in FIG. 4A. The internal test clocksignal iTCK is turned to the “L” level behind the trailing edge of theexternal test clock signal eTCK by a clock trailing delay time Tck2 asshown in FIG. 4B. Therefore, the clock delay time measurement NMOStransistor 141 is turned OFF, and then the electrical potential of thedelay time measurement terminal 130 is turned to the “H” level as shownin FIG. 4G. That is, the delay time measurement signal Sdt is turned tothe “H” level behind the trailing edge of the external test clock signaleTCK by a second measurement delay time Tmd2.

Next, the external test write enable signal TWE is turned to the “H”level behind the trailing edge of the external test clock signal eTCK bya second predetermined time Tb, while the external test clock signaleTCK and the external test read enable signal eTRE are kept at the “L”level as shown in FIG. 4C. Then, the internal test write enable signaliTWE is turned to the “H” level behind the rising edge of the externaltest write enable signal eTWE by a write enable rising delay time Twe1as shown in FIG. 4D. Therefore, the write enable delay time measurementNMOS transistor 142 is turned ON, and then the electrical potential ofthe delay time measurement terminal 130 is turned to the “L” level asshown in FIG. 4G. That is, the electrical potential of the delay timemeasurement terminal 130 is turned to the “L” level behind the risingedge of the external test write enable signal eTWE by a thirdmeasurement delay time Tmd3. The external test write enable signal eTWEis turned to the “L” level behind the rising edge of the external testwrite enable signal eTWE by a third predetermined time Tc as shown inFIG. 4C. The internal test write enable signal iTWE is turned to the “L”level behind the trailing edge of the external test write enable signaleTWE by a write enable trailing delay time Twe2 as shown in FIG. 4D.Therefore, the write enable delay time measurement NMOS transistor 142is turned OFF, and then the electrical potential of the delay timemeasurement terminal 130 is turned to the “H” level as shown in FIG. 4G.That is, the electrical potential of the delay time measurement terminal130 is turned to the “H” level behind the trailing edge of the externaltest write enable signal eTWE by a fourth measurement delay time Tmd4.

Furthermore, the external test read enable signal eTRE is turned to the“H” level behind the trailing edge of the external test write enablesignal eTWE by a fourth predetermined time Td, while the external testclock signal TCLK and the external test write enable signal eTWE arekept at the “L” level as shown in FIG. 4E. Then, the internal test readenable signal iTRE is turned to the “H” level behind the rising edge ofthe external test read enable signal eTRE by a read enable rising delaytime Tre1 as shown in FIG. 4F. Therefore, the read enable delay timemeasurement NMOS transistor 143 is turned ON, and then the electricalpotential of the delay time measurement terminal 130 is turned to the“L” level as shown in FIG. 4G. That is, the electrical potential of thedelay time measurement terminal 130 is turned to the “L” level behindthe rising edge of the external test read enable signal eTRE by a fifthmeasurement delay time Tmd5. The external test read enable signal eTREis turned to the “L” level behind the rising edge of the external testread enable signal eTRE by a fifth predetermined time Te as shown inFIG. 4E. The internal test read enable signal iTRE is turned to the “L”level behind the trailing edge of the external test read enable signalTRE by a read enable trailing delay time Tre2 as shown in FIG. 4F.Therefore, the read enable delay time measurement NMOS transistor 143 isturned OFF, and then the electrical potential of the delay timemeasurement terminal 130 is turned to the “H” level as shown in FIG. 4G.That is, the electrical potential of the delay time measurement terminal130 is turned to the “L” level behind the trailing edge of the externaltest read enable signal eTRE by a sixth measurement delay time Tmd6. Themeasurements of the delay times of the internal test clock signal iTCK,the internal test write enable signal iTWE and the internal test readenable signal iTRE are executed as stated above.

The calculation method of a time difference between the delay times withrespect to the different internal test signals is described below.

Initially, a calculation method of the time difference between the delaytimes with respect to the rising edge of the internal test clock signaliTCK and the rising edge of the internal test write enable signal iTWEis described in detail. A delay time between rising edges of signalswith respect to the external output terminal 131 and the internal inputterminal 111 corresponds with the clock rising delay time Tck1 whichindicates the delay time of the rising edge of the internal test clocksignal iTCLK against the rising edge of the external test clock signaleTCK. Also, a delay time between rising edges of signals with respect tothe external output terminal 132 and the internal input terminal 112corresponds with the write enable rising delay time Twe1 which indicatesthe delay time of the rising edge of the internal test write enablesignal iTWE against the rising edge of the external test write enablesignal eTWE. Accordingly, the time difference between the delay timeswith respect to the rising edge of the internal test clock signal iTCKand the rising edge of the internal test write enable signal iTWE may beexpressed by a difference between the clock rising delay time Tck1 andthe write enable rising delay time Twe1. However, the clock rising delaytime Tck1 and the write enable rising delay time Twe1 may not bedirectly measured. Meanwhile, a delay time between the rising edge ofthe internal test clock signal iTCK and the first trailing edge of thedelay time measurement signal Sdt approximately corresponds with a delaytime between the rising edge of the internal test write enable signaliTWE and the second trailing edge of the delay time measurement signalSdt. That is, a time difference between the first measurement delay timeTmd1 and the clock rising delay time Tck1 approximately corresponds witha time difference between the third measurement delay time Tmd3 and thewrite enable rising delay time Twe1. Therefore, a time differencebetween the clock rising delay time Tck1 and the write enable risingdelay time Twe1 corresponds with a time difference between the firstmeasurement delay time Tmd1 and the third measurement delay time Tmd3.Accordingly, the time difference between the delay times with respect tothe rising edge of the internal test clock signal iTCK and the risingedge of the internal test write enable signal iTWE is calculated by thefirst measurement delay time Tmd1 and the third measurement delay timeTmd3.

The calculation method of the time difference between the delay timeswith respect to the rising edge of the internal test clock signal iTCKand the rising edge of the internal test read enable signal iTRE isdescribed in detail. As described above, the delay time with respect tothe rising edge of the signal between the external input terminal 131and the internal input terminal 111 corresponds with the clock risingdelay time Tck1. Also, a delay time between rising edges of signals withrespect to the external output terminal 133 and the internal inputterminal corresponds with the read enable rising delay time Tre1 whichindicates the delay time of the rising edge of the internal test readenable signal iTRE against the rising edge of the external test readenable signal eTRE. Accordingly, the time difference between the delaytimes with respect to the rising edge of the internal test clock signaliTCK and the rising edge of the internal test read enable signal iTREmay be expressed by a difference between the clock rising delay timeTck1 and the read enable rising delay time Tre1. However, the clockrising delay time Tck1 and the read enable rising delay time Tre1 maynot be directly measured. Meanwhile, the delay time between the risingedge of the internal test clock signal iTCK and the first trailing edgeof the delay time measurement signal Sdt approximately corresponds witha delay time between the rising edge of the internal test read enablesignal iTRE and the third trailing edge of the delay time measurementsignal Sdt. That is, the time difference between the first measurementdelay time Tmd1 and the clock rising delay time Tck1 approximatelycorresponds with a time difference between the fifth measurement delaytime Tmd5 and the read enable rising delay time Tre1. Therefore, a timedifference between the clock rising delay time Tck1 and the read enablerising delay time Twe1 corresponds with a time difference between thefirst measurement delay time Tmd1 and the fifth measurement delay timeTmd5. Accordingly, the time difference between the delay times withrespect to the rising edge of the internal test clock signal iTCK andthe rising edge of the internal test read enable signal iTRE iscalculated by the first measurement delay time Tmd1 and the fifthmeasurement delay time Tmd5.

Next, the calculation method of an elapsed time from the rising edge ofthe internal test clock signal iTCK till the trailing edge of theinternal test write enable signal iTWE is described in detail. In thiscase, the elapsed time may be expressed by a sum of the firstpredetermined time Ta except the clock rising delay time Tck1, thesecond predetermined time Tb, the third predetermined time Tc and thewrite enable trailing delay time Twe2. Hereupon, as described above, thedelay time between the rising edges of the signals with respect to theexternal output terminal 131 and the internal input terminal 111corresponds with the clock rising delay time Tck1. Also, a delay timebetween trailing edges of signals with respect to the external outputterminal 132 and the internal input terminal 112 corresponds with thewrite enable trailing delay time Twe2 which indicates the delay time ofthe trailing edge of the internal test write enable signal iTWE againstthe trailing edge of the external test write enable signal eTWE.Accordingly, the time difference between the delay times with respect tothe rising edge of the internal test clock signal iTCK and the trailingedge of the internal test write enable signal iTWE may be expressed by adifference between the clock rising delay time Tck1 and the write enabletrailing delay time Twe2. However, the clock rising delay time Tck1 andthe write enable trailing delay time Twe2 may not be directly measured.Meanwhile, the delay time between the rising edge of the internal testclock signal iTCK and the first trailing edge of the delay timemeasurement signal Sdt approximately corresponds with a delay timebetween the trailing edge of the internal test write enable signal iTWEand the second rising edge of the delay time measurement signal Sdt.That is, the time difference between the first measurement delay timeTmd1 and the clock rising delay time Tck1 approximately corresponds witha time difference between the fourth measurement delay time Tmd4 and thewrite enable trailing delay time Twe2. Therefore, a time differencebetween the clock rising delay time Tck1 and the write enable trailingdelay time Twe2 corresponds with a time difference between the firstmeasurement delay time Tmd1 and the fourth measurement delay time Tmd4.Accordingly, the elapsed time from the rising edge of the internal testclock signal iTCK till the trailing edge of the internal test writeenable signal iTWE can be calculated by a sum of the first predeterminedtime Ta except the first measurement delay time Tmd1, the secondpredetermined time Tb, the third predetermined time Tc and the fourthmeasurement delay time Tmd4.

The calculation method of an elapsed time from the rising edge of theinternal test clock signal iTCK till the trailing edge of the internaltest read enable signal iTRE is described in detail. In this case, theelapsed time may be expressed by a sum of the first predetermined timeTa except the clock rising delay time Tck1, the second predeterminedtime Tb, the third predetermined time Tc, the fourth predetermined timeTd, the fifth predetermined time Te and the read enable trailing delaytime Tre2. Hereupon, as described above, the delay time between therising edges of the signals with respect to the external output terminal131 and the internal input terminal 111 corresponds with the clockrising delay time Tck1. Also, a delay time between trailing edges ofsignals with respect to the external output terminal 133 and theinternal input terminal 1 13 corresponds with the read enable trailingdelay time Tre2 which indicates the delay time of the trailing edge ofthe internal test read enable signal iTRE against the trailing edge ofthe external test read enable signal eTRE. Accordingly, the timedifference between the delay times with respect to the rising edge ofthe internal test clock signal iTCK and the trailing edge of theinternal test read enable signal iTRE may be expressed by a differencebetween the clock rising delay time Tck1 and the read enable trailingdelay time Tre2. However, the clock rising delay time Tck1 and the readenable trailing delay time Tre2 may not be directly measured. Meanwhile,the delay time between the rising edge of the internal test clock signaliTCK and the first trailing edge of the delay time measurement signalSdt approximately corresponds with a delay time between the trailingedge of the internal test read enable signal iTRE and the second risingedge of the delay time measurement signal Sdt. That is, the timedifference between the first measurement delay time Tmd1 and the clockrising delay time Tck1 approximately corresponds with a time differencebetween the sixth measurement delay time Tmd6 and the read enabletrailing delay time Tre2. Therefore, a time difference between the clockrising delay time Tck1 and the read enable trailing delay time Tre2corresponds with a time difference between the first measurement delaytime Tmd1 and the sixth measurement delay time Tmd6. Accordingly, theelapsed time from the rising edge of the internal test clock signal iTCKtill the trailing edge of the internal test read enable signal iTRE canbe calculated by a sum of the first predetermined time Ta except thefirst measurement delay time Tmd1, the second predetermined time Tb, thethird predetermined time Tc, the fourth predetermined time Td, the fifthpredetermined time Te and the sixth measurement delay time Tmd6.

Furthermore, the calculation method of the difference between the delaytimes with respect to the trailing edge of the internal test clocksignal iTCK and the trailing edge of the internal test write enablesignal iTWE is described in detail. A delay time between trailing edgesof signals with respect to the external output terminal 131 and theinternal input terminal 111 corresponds with the clock trailing delaytime Tck2 which indicates the delay time of the trailing edge of theinternal test clock signal iTCLK against the trailing edge of theexternal test clock signal eTCK. Also, as described above, the delaytime with respect to the trailing edge of the signal between theexternal input terminal 132 and the internal input terminal 1 12corresponds with the write enable trailing delay time Twe2. Accordingly,the time difference between the delay times with respect to the trailingedge of the internal test clock signal iTCK and the trailing edge of theinternal test write enable signal iTWE may be expressed by a differencebetween the clock trailing delay time Tck2 and the write enable trailingdelay time Twe2. However, the clock trailing delay time Tck2 and thewrite enable trailing delay time Twe2 may not be directly measured.Meanwhile, a delay time between the trailing edge of the internal testclock signal iTCK and the first rising edge of the delay timemeasurement signal Sdt approximately corresponds with a delay timebetween the trailing edge of the internal test write enable signal iTWEand the second rising edge of the delay time measurement signal Sdt.That is, a time difference between the second measurement delay timeTmd2 and the clock trailing delay time Tck2 approximately correspondswith a time difference between the fourth measurement delay time Tmd4and the write enable trailing delay time Twe2. Therefore, a timedifference between the clock trailing delay time Tck2 and the writeenable trailing delay time Twe2 corresponds with a time differencebetween the second measurement delay time Tmd2 and the fourthmeasurement delay time Tmd4. Accordingly, the difference between thedelay times with respect to the trailing edge of the internal test clocksignal iTCK and the trailing edge of the internal test write enablesignal iTWE is calculated by the second measurement delay time Tmd2 andthe fourth measurement delay time Tmd4.

The calculation method of the difference between the delay times withrespect to the trailing edge of the internal test clock signal iTCK andthe trailing edge of the internal test read enable signal iTRE isdescribed in detail. As described above, the delay time with respect tothe trailing edge of the signal between the external input terminal 131and the internal input terminal 111 corresponds with the clock trailingdelay time Tck2. Also, as described above, the delay time with respectto the trailing edge of the signal between the external input terminal133 and the internal input terminal 113 corresponds with the read enabletrailing delay time Tre2. Accordingly, the time difference between thedelay times with respect to the trailing edge of the internal test clocksignal iTCK and the trailing edge of the internal test read enablesignal iTRE may be expressed by a difference between the clock trailingdelay time Tck2 and the read enable trailing delay time Tre2. However,the clock trailing delay time Tck2 and the read enable trailing delaytime Tre2 may not be directly measured. Meanwhile, the delay timebetween the trailing edge of the internal test clock signal iTCK and thefirst rising edge of the delay time measurement signal Sdt approximatelycorresponds with a delay time between the trailing edge of the internaltest read enable signal iTRE and the third rising edge of the delay timemeasurement signal Sdt. That is, the time difference between the secondmeasurement delay time Tmd2 and the clock trailing delay time Tck2approximately corresponds with a time difference between the sixthmeasurement delay time Tmd6 and the read enable trailing delay timeTre2. Therefore, a time difference between the clock trailing delay timeTck2 and the read enable trailing delay time Tre2 corresponds with atime difference between the second measurement delay time Tmd2 and thesixth measurement delay time Tmd6. Accordingly, the difference betweenthe delay times with respect to the trailing edge of the internal testclock signal iTCK and the trailing edge of the internal test read enablesignal iTRE is calculated by the second measurement delay time Tmd2 andthe sixth measurement delay time Tmd6.

According to the first preferred embodiment, the semiconductorintegrated circuit includes the delay time measurement terminal coupledto the internal input terminals of the CUT (for example, the memorycircuit) and includes the delay time measurement circuit coupled to theCUT and the delay time measurement terminal. In the semiconductorintegrated circuit, elapsed times are measured after the external testinput signals are turned to the “H” level or the “L” level till thedelay time measurement signal is turned to the “L” level or the “H”level. Therefore, the time difference between the delay times withrespect to the different internal test input signals can be calculatedbased on the elapsed times. That is, the operational test can beexecuted only against the CUT without the needle pico-probe contactingthe internal input terminals by hand. As a result, not only the timerequired in the operational test can be reduced, but also theoperational test can be easily executed under the condition of hightemperature.

Furthermore, according to the first preferred embodiment, the delay timemeasurement circuit is composed of the delay time measurementtransistors that respectively have open drain electrodes. Therefore,different power supply voltages are not necessary in the delay timemeasurement circuit in contrast to a delay time measurement circuit thatis composed of transistors that have source follower electrodes. Thatis, the time difference between the delay times with respect to thedifferent internal test input signals can be measured with the delaytime measurement circuit in a smaller area.

FIG. 5 is a schematic circuit diagram for describing a semiconductorintegrated circuit 200 according to a second preferred embodiment of thepresent invention. The semiconductor integrated circuit 200 measures anaccess time from inputting an internal clock signal to the memorycircuit till outputting an internal data output signal from the memorycircuit. The semiconductor integrated circuit 200 includes a memorycircuit 210, a logic circuit 220, a plurality of external inputterminals 231 through 233, an external output terminal 236, a delay timemeasurement circuit 240, a first and second delay time measurementterminals 230A and 230B, and a test control terminal 230C. In thisexample, the memory circuit 210 is the CUT.

The memory circuit 210 includes a plurality of internal input terminals211 through 213 that respectively receive internal input signals andfurther includes an internal output terminal 216 that outputs aninternal output signal. In this example, the internal input signalsinclude an internal clock signal iCK, an internal write enable signaliWE and an internal read enable signal iRE. Also, the internal outputsignal includes an internal data output signal iDO.

The logic circuit 220 includes a peripheral circuit such as aninput-output circuit with respect to the memory circuit 210. The logiccircuit 220 provides the internal input signals for the memory circuit210, based on a plurality of external input signals that have been inputto the external input terminals 131 through 133. Also, the logic circuit220 generates an external output signal as the data output signal, basedon the internal data output signal iDO that have been output from theinternal output terminal 216.

Hereupon, during the normal operational mode of the semiconductorintegrated circuit 200, the external input signals include an externalclock signal eCK, an external write enable signal eWE and an externalread enable signal eRE, and the external output signal includes anexternal data output signal eDO. That is, the logic circuit 220generates the internal clock signal iCK, the internal write enablesignal iWE and the internal read enable signal iRE based on the externalclock signal eCK, the external write enable signal eWE and the externalread enable signal eRE for the internal input terminals 231 through 233of the memory circuit 210, and outputs the external data output signaleDO based on the internal data output signal iDO.

On the other hand, during an operational test mode of the semiconductorintegrated circuit 200, the logic circuit 220 receives a plurality ofexternal input test signals and then provides them straight to theinternal input terminals 231 through 233 of the memory circuit 210 as aplurality of internal input test signals, and further receives aninternal output test signal and then provides it straight to theexternal output terminal 236 as an external output test signal. In thisexample, the external input test signals include an external test clocksignal eTCK, an external test write enable signal eTWE and an externaltest read enable signal eTRE, and the internal input test signalsinclude an internal test clock signal iTCK, an internal test writeenable signal iTWE and an internal test read enable signal iTRE. Also,the external output test signal includes an external test data outputsignal eTDO, and the internal output test signal includes an internaltest data output signal iTDO.

That is, the logic circuit 220 receives the external test clock signaleTCK, the external test write enable signal eTWE and the external testread enable signal eTRE and then provides them straight to the internalinput terminals 231 through 233 of the memory circuit 210 as theinternal test clock signal iTCK, the internal test write enable signaliTWE and the internal test read enable signal iTRE. Also, the logiccircuit 220 receives the internal test data output signal iTDO and thenprovides it straight to the external output terminal 236 as the externaltest data output signal eTDO.

The delay time measurement circuit 240 detects the clock delay timeCKDT, the write enable delay time WEDT and the read enable delay timeREDT. The delay time measurement circuit 240 is coupled between thefirst electrical source terminal T1 and the second electrical sourceterminal T2 and includes a plurality of first delay time measurementNMOS transistors 241 through 243 and a first current generator 244. Thefirst delay time measurement NMOS transistors 241 through 243 arecoupled in parallel with one another between the first delay timemeasurement terminal 230A and the second electrical source terminal T2.The delay time measurement NMOS transistors 241 through 243 respectivelyhave open drain electrodes and constitute a wired NOR circuit in orderto pull up an electrical potential of the first delay time measurementterminal 230A as well as according to the first preferred embodiment.The current generator 244 is coupled between the first electrical sourceterminal T1 and the first delay time measurement terminal 230A. Thefirst current generator 244 provides a first pull-up voltage to thefirst delay time measurement terminal 230A based on the power supplyvoltage Vcc. Also, the delay time measurement circuit 240 includes afirst delay time approximation NMOS transistor 246 coupled between thefirst delay time measurement terminal 230A and the second electricalsource terminal T2. The first delay time approximation NMOS transistor246 includes a gate electrode coupled to the test control terminal 230Cso as to receive a test control signal Stc. In addition, the firstcurrent generator 244 may be outside of the semiconductor integratedcircuit 200. The electrical potential of the first delay timemeasurement terminal 230A is output from the first delay timemeasurement terminal 230A as a first delay time measurement signal Sdt1.

Furthermore, the delay time measurement circuit 240 includes a seconddelay time measurement NMOS transistor 251 and a second currentgenerator 254. The second delay time measurement NMOS transistor 251includes a source electrode coupled to the second electrical sourceterminal T2, a drain electrode coupled to the second delay timemeasurement terminal 230B, and a gate electrode coupled to the internaloutput terminal 216 of the memory circuit 210 so as to receive theinternal test data output signal iTDO. The second current generator 254is coupled between the first electrical source terminal T1 and thesecond delay time measurement terminal 230B. The second currentgenerator 254 provides a second pull-up voltage to the second delay timemeasurement terminal 230B based on the power supply voltage Vcc. Thesecond pull-up voltage may be different than the first pull-up voltage.Also, the delay time measurement circuit 240 includes a second delaytime approximation NMOS transistor 256 coupled between the second delaytime measurement terminal 230B and the second electrical source terminalT2. The second delay time approximation NMOS transistor 256 includes agate electrode coupled to the test control terminal 230C so as toreceive the test control signal Stc as well as the first delay timeapproximation NMOS transistor 246. In addition, the second currentgenerator 254 may be outside of the semiconductor integrated circuit200. The electrical potential of the second delay time measurementterminal 230B is output from the second delay time measurement terminal230B as a second delay time measurement signal Sdt2.

The operation of the semiconductor integrated circuit 200 according tothe second preferred embodiment of the present invention is describedbelow. FIGS. 6A through 6G are signal waveform diagrams for describingthe operation of the semiconductor integrated circuit 200 in FIG. 5.FIG. 6A represents a waveform of the external test clock signal eTCK,FIG. 6B represents a waveform of the test control signal Stc, FIG. 6Crepresents a waveform of the internal test clock signal iTCK, FIG. 6Drepresents a waveform of the internal test data output signal iTDO, FIG.6E represents a waveform of the external test data output signal iTDO,FIG. 6F represents a waveform of the first delay time measurement signalSdt1, and FIG. 6G represents a waveform of the second delay timemeasurement signal Sdt2.

First of all, when electrical potentials of the external input terminals231 through 233 and the test control terminal 230C, that is, theexternal test clock signal eTCK, the external test write enable signaleTWE, the external test read enable signal eTRE and the test controlsignal Stc are kept at the “L” level, the internal test data outputsignal iTDO is kept at the “L” level. Therefore, all of the first andsecond delay time measuring NMOS transistors 241 through 243 and 251 andthe first and second delay time approximation NMOS transistor 246 and256 are turned OFF. Thus, electrical potentials of the first and seconddelay time measurement terminals 230A and 230B, that is, the first andsecond delay time measurement signals Sdt1 and Sdt2 are kept at the “H”level by the first and second current generators 244 and 254.

Next, the external test clock signal eTCK is turned to the “H” levelwhile the external test write enable signal eTWE and the external testread enable signal eTRE are kept at the “L” level as shown in FIG. 6A.Then, the internal test clock signal iTCK is turned to the “H” levelbehind the rising edge of the external test clock signal eTCK by a clockrising delay time Tck1 as shown in FIG. 6C. Therefore, the clock delaytime measurement NMOS transistor 241 is turned ON, and then theelectrical potential of the first delay time measurement terminal 230Ais turned to the “L” level as shown in FIG. 6F. That is, the first delaytime measurement signal Sdt1 is turned to the “L” level behind therising edge of the external test clock signal eTCK by a firstmeasurement delay time Tmd1 as shown in FIG. 6F. The first measurementdelay time Tmd1 can be measured in accordance with the rising edge ofthe external test clock signal eTCK and the trailing edge of the firstdelay time measurement signal Sdt1. Also, an elapsed time between therising time of the internal clock signal iTCK and the trailing edge ofthe first delay time measurement signal Sdt1 is defined as an internalclock rising delay time Tick1.

When the internal test clock signal iTCK is turned to the “H” level, anelectrical potential of the internal output terminal 216, that is, theinternal data output signal iTDO is turned to the “H” level. Therefore,the external test data output signal eTDO is turned to the “H” levelbehind the rising edge of the internal data output signal iTDO by a dataoutput rising delay time Tdo1 as shown in FIG. 6E. The data outputrising delay time Tdo1 indicates a delay time between rising edges ofsignals with respect to the external output terminal 236 and theinternal output terminal 216. Hereupon, an external access time eTacscan be measured in accordance with the rising edge of the external testclock signal eTCK and the rising edge of the external data output signaleTDO.

Then, the external test clock signal eTCK is turned to the “L” levelafter the rising edge of the external data output signal eTDO. Thus, theinternal test clock signal iTCK is turned to the “L” level. As a result,the internal data output signal iTDO is turned to the “L” level and thenthe external data output signal eTDO is also turned to the “L” level. Atthis moment, since all of the internal test clock signal iTCK, theinternal test write enable signal iTWE, the internal test read enablesignal iTRE, the internal test data output signal iTDO and the testcontrol signal Stc are kept at the “L” level. Therefore, all of thefirst and second delay time measuring NMOS transistors 241 through 243and 251 and the first and second delay time approximation NMOStransistors 246 and 256 are turned OFF. Thus, the first and second delaytime measurement signals Sdt1 and Sdt2 that are output from the firstand second delay time measurement terminals 230A and 230B arerespectively turned to the first and second pull-up voltages by thefirst and second current generators 244 and 254 as shown in FIGS. 6F and6G.

After the rising edges of the first and second delay time measurementsignals Sdt1 and Sdt2, the test control signal Stc is turned to the “H”level while the external test clock signal eTCK, the external test writeenable signal eTWE and the external test read enable signal eTRE arekept at the “L” level as shown in FIG. 6B. Therefore, the first andsecond delay time approximation NMOS transistor 246 and 256 are turnedON, and then the first and second delay time measurement signals Sdt1and Sdt2 are turned to the “L” level. Hereupon, two delay times can bemeasured on the first and second delay time measurement terminals 230Aand 230B. Thai is, the delay time between the rising edge of the testcontrol signal Stc and the trailing edge of the first delay timemeasurement signal Sdt1 can be measured as a second measurement delaytime Tmd2 and the other delay time between the rising edge of the testcontrol signal Stc and the trailing edge of the second delay timemeasurement signal Sdt2 can be measured as a third measurement delaytime Tmd3.

The calculation method of the access time from inputting the internaltest clock signal iTCK to the memory circuit 210 till outputting theinternal data output signal iTDO from the memory circuit 210 isdescribed below.

The second measurement delay time Tmd2 is an elapsed time from turningthe test control signal Stc to the “H” level till turning the firstdelay time measurement signal Sdt1 to the “L” level. Meanwhile, theinternal clock rising delay time Tick1 is an elapsed time from inputtingthe internal clock signal iTCK of the “H” level to the gate electrode ofthe first delay time measuring NMOS transistor 241 till turning thefirst delay time measurement signal Sdt1 to the “L” level. Hereupon, thefirst delay time measuring NMOS transistor 241 has the same volt-amperecharacteristic as the first delay time approximation NMOS transistor246. Alternatively, a ratio of a gate width to a gate length of thefirst delay time measuring NMOS transistor 241 is greater than a rationof a gate width to a gate length of the first delay time approximationNMOS transistor 246. Accordingly, the second measurement delay time Tmd2approximately corresponds with the internal clock rising delay timeTick1 between the rising time of the internal clock signal iTCK and thetrailing edge of the first delay time measurement signal Sdt1 as seen inFIGS. 6C and 6F. Therefore, the clock rising delay time Tck1, thatindicates a delay time between rising edges of signals with respect tothe external input terminal 231 and the internal input terminal 211,approximately corresponds with a difference between The firstmeasurement delay time Tmd1 and the second measurement delay time Tmd2.That is, the clock rising delay time Tck1 can be obtained by adifference between the first measurement delay time Tmd1 and the secondmeasurement delay time Tmd2.

On the other hand, the second delay time measuring NMOS transistor 251is designed so that the data output rising delay time Tdo1 can be equalto an elapsed time from turning the internal test data output signaliTDO to the “H” level till turning the second delay time measurementsignal Sdt2 to the “L” level. For example, the second delay timeapproximation NMOS transistor 256 has the same volt-amperecharacteristic as the second delay time measuring NMOS transistor 251.Alternatively, a ratio of a gate width to a gate length of the seconddelay time measuring NMOS transistor 251 is greater than a gate width ofa gate length of the second delay time approximation NMOS transistor256. That is, the third measurement delay time Tmd3 that indicates theelapsed time from turning the test control signal Stc to the “H” leveltill turning the second delay time measurement signal Sdt2 to the “L”level is equal to the elapsed time from turning the internal test dataoutput signal iTDO to the “H” level till turning the second delay timemeasurement signal Sdt2 to the “L” level. Accordingly, the thirdmeasurement delay time Tmd3 approximately corresponds with the dataoutput rising delay time Tdo1.

As described above, the access time of the memory circuit 210 is anelapsed time from inputting the internal test clock signal iTCK to thememory circuit 210 till outputting the internal data output signal iTDOfrom the memory circuit 210. As seen from FIGS. 6A and 6C through 6E,the access time of the memory circuit 210 is calculated by the externalaccess time eTacs except the clock rising delay time Tck1 and the dataoutput rising delay time Tdo1. Hereupon, as described above, the clockrising delay time Tck1 is approximately equal to the difference betweenthe first measurement delay time Tmd1 and the second measurement delaytime Tmd2, and the data output rising delay time Tdo1 is approximatelyequal to the third measurement delay time Tmd3. Accordingly, the accesstime of the memory circuit 210 can be obtained by a sum of the externalaccess time eTacs and the second measurement delay time Tmd2 except thefirst and third measurement delay times Tmd1 and Tmd3.

According to the second preferred embodiment, the semiconductorintegrated circuit includes the first delay time measurement terminalcoupled to the internal input terminals of the CUT (for example, thememory circuit) and the second delay time measurement terminal coupledto the internal output terminal of the CUT. The semiconductor integratedcircuit further includes the delay time measurement circuit coupled tothe CUT and the first and second delay time measurement terminals. Also,the delay time measurement circuit includes the first and second delaytime approximation transistors in order to measure the clock risingdelay time and the data output rising delay time. In the above-mentionedsemiconductor integrated circuit, the elapsed time from inputting theinternal test clock signal to the CUT till outputting the internal dataoutput signal from the CUT is measured through the first and seconddelay time measurement terminals. That is, the access time with respectto the CUT can be properly measured. Furthermore, in the above-mentionedsemiconductor integrated circuit, the operational test can be executedonly against the CUT without the needle pico-probe contacting theinternal input and output terminals by hand. As a result, not only canthe time required in the operational test be reduced, but also theoperational test can be easily executed under the condition of hightemperature.

In addition, according to the second preferred embodiment, elapsed timescan be directly measured from turning the internal test clock signal,the internal test write enable signal, the internal test read enablesignal and the internal test data output signal to the “H” level or the“L” level till turning the first and second delay time measurementsignals to the “L” level or the “H” level. Therefore, the delay timebetween the external input signal and the internal input signal and thedelay time between the internal output signal and the external outputsignal can be easily measured.

FIG. 7 is a schematic circuit diagram for describing a semiconductorintegrated circuit 300 according to a third preferred embodiment of thepresent invention. The semiconductor integrated circuit 300 includes amemory circuit 310, a logic circuit 320, a plurality of external inputterminals 331 through 333, a delay time measurement circuit 340 and adelay time measurement terminal 330. In this example, the memory circuit310 is the CUT.

The memory circuit 310 includes a plurality of internal input terminals311 through 313 as well as the internal input terminals 111 thorugh 113of the memory circuit 110 according to the first preferred embodiment.

The logic circuit 320 is coupled between the external input terminals331 through 333 and the internal input terminals 311 though 313 so as togenerate internal input test signals based on external input testsignals. The external input test signals include the external test clocksignal eTCK, the external test write enable signal eTWE and the externaltest read enable signal eTRE, and the internal input test signalsinclude the internal test clock signal iTCK, the internal test writeenable signal iTWE and the internal test read enable signal iTRE.

The delay time measurement circuit 340 is coupled between the firstelectrical source terminal T1 and the second electrical source terminalT2 and includes a plurality of delay time measurement NMOS transistors341 through 343 and a current generator 344. The delay time measurementNMOS transistors 141 through 143 are coupled between the delay timemeasurement terminal 330 and the second electrical source terminal T2and respectively controlled by the internal test clock signal iTCK, theinternal test write enable signal iTWE and the internal test read enablesignal iTRE. The current generator 344 is coupled between the firstelectrical source terminal T1 and the delay time measurement terminal330. The current generator 344 provides a pull-up voltage to the delaytime measurement terminal 330 based on the power supply voltage Vcc. Thecurrent generator 344 may be outside of the semiconductor integratedcircuit 200. The delay time measurement circuit 340 further includes aswitching NMOS transistor 301 coupled between the delay time measurementterminal 330 and the current generator 344. The switching NMOStransistor 301 is also coupled to the delay time measurement NMOStransistors 141 through 143. The switching NMOS transistor 301 includesa gate electrode that receives a test mode select signal TMS. The testmode select signal TMS switches the semiconductor integrated circuit 300into the normal operational mode or the operational test mode. The testmode select signal TMS may be generated from the logic circuit 320 ormay be generated externally. Furthermore, the delay time measurementterminal 330 is coupled not only to the delay time measurement circuit340 but also to the logic circuit 320. That is, the delay timemeasurement terminal 330 is used as an input-output terminal during thenormal operational mode of the semiconductor integrated circuit 300.Also, the delay time measurement terminal 330 output the electricalpotential of the delay time measurement terminal 330 as a delay timemeasurement signal Sdt during the operational test mode of thesemiconductor integrated circuit 300.

The operation of the semiconductor integrated circuit 300 according tothe third preferred embodiment of the present invention is describedbelow. FIGS. 8A through 8H are signal waveform diagrams for describingthe operation of the semiconductor integrated circuit 300 in FIG. 7.FIG. 8A represents a waveform of the external test clock signal eTCK,FIG. 8B represents a waveform of the internal test clock signal iTCK,FIG. 8C represents a waveform of the external test write enable signalTWE, FIG. 8D represents a waveform of the internal test write enablesignal iTWE, FIG. 8E represents a waveform of the external test readenable signal TRE, FIG. 8F represents a waveform of the internal testread enable signal iTRE, FIG. 8G represents a waveform of the delay timemeasurement signal Sdt, and FIG. 8H represents a waveform of the testmode select signal TMS.

During the operational test mode, the test mode select signal TMS isturned to the “H” level as shown in FIG. 8H. Thus, the switching NMOStransistor 301 is turned ON, and then the delay time measurement NMOStransistors 141 through 143 are electrically coupled to the delay timemeasurement terminal 330. As a result, the measurements of the delaytimes of the internal test clock signal iTCK, the internal test writeenable signal iTWE and the internal test read enable signal iTRE can beexecuted and then the time difference between the delay times withrespect to the different internal test signals can be obtained as wellas according to the first preferred embodiment. After the operationaltest is completed, the test mode select signal TMS is turned to the “L”level.

According to the third preferred embodiment, the same effects can berealized as well as according to the first preferred embodiment.Furthermore, according to the third preferred embodiment, the delay timemeasurement terminal, from which the delay time measurement signal isoutput during the operational test mode, is used as the input-outputterminal during the normal operational mode. Therefore, the increase ofthe number of the external input terminals disposed in the semiconductorintegrated circuit can be suppressed. As a result, the increase of thearea of the semiconductor integrated circuit can be suppressed.

FIG. 9 is a schematic circuit diagram for describing a semiconductorintegrated circuit 400 according to a fourth preferred embodiment of thepresent invention. The semiconductor integrated circuit 400 measuresconsumption current in the memory circuit. The semiconductor integratedcircuit 400 includes a memory circuit 410, a logic circuit 420, aplurality of external input terminals 431 through 434, an externaloutput terminal 436, and a pseudo test terminal 430. In this example,the memory circuit 410 is the CUT.

The memory circuit 410, that is coupled to the first electrical sourceterminal T1 and the second electrical source terminal T2, includes aplurality of internal input terminals 411 through 415 that respectivelyreceive internal input signals and further includes an internal outputterminal 416 that outputs an internal output signal. In this example,the internal input signals include an internal clock signal iCK, aninternal write enable signal iWE, an internal read enable signal iRE, aninternal data input signal iDI, and an internal test mode select signaliTMS. The internal output signal includes an internal data output signaliDO. The memory circuit 410 also includes an input switching circuit 417and an output switching circuit 418. The internal output terminal 416 ofthe memory circuit 410 is coupled to the pseudo test terminal 430 intowhich a pseudo test signal Spt is input.

The logic circuit 420 is coupled between the memory circuit 410 and theexternal input terminals 431 through 434 and is coupled to the firstelectrical source terminal T1 and the second electrical source terminalT2. The logic circuit 420 generates the internal input signals based ona plurality of external input signals. The external input signalsinclude an external clock signal eCK, an external write enable signaleWE, an external read enable signal eRE, and an external data inputsignal eDI. That is, the logic circuit 420 generates the internal clocksignal iCK, the internal write enable signal iWE, the internal readenable signal iRE, and the internal data input signal iDI for theinternal input terminals 411 through 415 of the memory circuit 410,based on the external clock signal eCK, the external write enable signaleWE, the external read enable signal eRE, and the external data inputsignal eDI. Also, the logic circuit 420 generates an external outputsignal based on the internal output signal. The external output signalincludes an external data output signal eDO. That is, the logic circuit420 generates the external data output signal eDO based on the internaldata output signal iDO. The external data output signal eDO is outputfrom the external output terminal 436. In addition, the logic circuit420 turns the internal test mode select signal iTMS to the “L” levelwhen consumption current in the whole semiconductor integrated circuit400 is measured, and turns the internal test mode select signal iTMS tothe “H” level when consumption current only in the logic circuit 420 ismeasured.

FIGS. 10A and 10B are schematic circuit diagrams for describing theinput switching circuit 417 and the output switching circuit 418 of thememory circuit 410 in the semiconductor integrated circuit 400 in FIG.9.

As shown in FIG. 10A, the input switching circuit 417 includes aninverter 417A and four NAND circuits 417B through 417E. The inverter417A includes an input node coupled to the internal input terminal 415and an output node coupled to the NAND circuits 417B through 417E. TheNAND circuits 417B through 417E respectively have output nodes coupledto an internal circuit of the memory circuit 410. The inverter 417Areceives the internal test mode select signal iTMS and then provides aninverted internal test mode select signal iTMSb for the NAND circuits417B through 417E. The NAND circuit 417B includes an input node coupledto the internal input terminal 411 to receive the internal clock signaliCK. The NAND circuit 417B outputs an inverted internal clock signaliCKb when the inverted internal test mode select signal iTMSb is turnedto the “H” level. Also, an output node of the NAND circuit 417B is keptto have high impedance when the inverted internal test mode selectsignal iTMSb is turned to the “L” level. The NAND circuit 417C includesan input node coupled to the internal input terminal 412 to receive theinternal write enable signal iWE. The NAND circuit 417C outputs aninverted internal write enable signal iWEb when the inverted internaltest mode select signal iTMSb is turned to the “H” level. Also, anoutput node of the NAND circuit 417C is kept to have the high impedancewhen the inverted internal test mode select signal iTMSb is turned tothe “L” level. The NAND circuit 417D includes an input node coupled tothe internal input terminal 413 to receive the internal read enablesignal iRE. The NAND circuit 417D outputs an inverted internal readenable signal iREb when the inverted internal test mode select signaliTMSb is turned to the “H” level. Also, an output node of the NANDcircuit 417D is kept to have the high impedance when the invertedinternal test mode select signal iTMSb is turned to the “L” level. TheNAND circuit 417E includes an input node coupled to the internal inputterminal 414 to receive the internal data input signal iDI. The NANDcircuit 417E outputs an inverted internal data input signal iDIb whenthe inverted internal test mode select signal iTMSb is turned to the “H”level. Also, an output node of the NAND circuit 417E is kept to have thehigh impedance when the inverted internal test mode select signal iTMSbis turned to the “L” level. As described above, the input switchingcircuit 417 inverts levels of the internal clock signal iCK, theinternal write enable signal iWE, the internal read enable signal iREand the internal data input signal iDI when the internal test modeselect signal iTMS is turned to the “L” level. On the other hand, whenthe internal test mode select signal iTMS is turned to the “H” level,the output nodes of the input switching circuit 417 are kept to have thehigh impedance.

As shown in FIG. 10B, the output switching circuit 418 includes aninverter 418A, two PMOS transistors 418B and 418C, and two NMOStransistors 418D and 418E. The inverter 418A includes an input nodecoupled to the internal input terminal 415 in order to invert theinternal test mode select signal iTMS and then output an invertedinternal test mode select signal iTMSb. The PMOS transistor 418Bincludes a source electrode coupled to the first electrical sourceterminal T1 and a gate electrode coupled to the internal input terminal415 so as to receive the internal test mode select signal iTMS. The PMOStransistor 418C includes a source electrode coupled to a drain electrodeof the PMOS transistor 418B, a drain electrode coupled to the internaloutput terminal 416 from which the internal data output signal iDO isoutput, and a gate electrode coupled to the internal circuit of thememory circuit 410 so as to receive a readout data RD from the memorycircuit 410. The NMOS transistor 418D includes a drain electrode coupledto the internal output terminal 416 and a gate electrode coupled to theinternal circuit of the memory circuit 410 so as to receive a readoutdata RD from the memory circuit 410. The NMOS transistor 418E includes asource electrode coupled to the second electrical source terminal T2, adrain electrode coupled to a source electrode of the NMOS transistor418D, and a gate electrode coupled to an output node of the inverter418A so as to receive the inverted internal test mode select signaliTMSb. As described above, the output switching circuit 418 inverts alevel of the readout data RD from the memory circuit 410, when theinternal test mode select signal iTMS is turned to the “L” level. On theother hand, when the internal test mode select signal iTMS is turned tothe “H” level, the internal output terminal 416 is kept to have the highimpedance.

The operation of the semiconductor integrated circuit 400 according tothe fourth preferred embodiment of the present invention is describedbelow. Before the consumption current in the memory circuit 410 ismeasured, the internal test mode select signal iTMS is turned to the “L”level by the logic circuit 420. On such an occasion as this, the inputswitching circuit 417 allows the inverted internal clock signal iCKb,the inverted internal write enable signal iWEb, the inverted internalread enable signal iREb and the inverted internal data input signal iDlbto be input to the internal of the memory circuit 410, and the outputswitching circuit 418 allows the internal data output signal iDO to beoutput from the memory circuit 410.

Then, the external clock signal eCK, the external write enable signaleWE, the external read enable signal eRE, and the external data inputsignal eDI, that are to be used when the semiconductor integratedcircuit 400 operates in the normal operational mode, are input to theexternal input terminals 431 through 434. At this point, the pseudo testterminal 430 is kept in a floating state. Accordingly, the logic circuit420 generates the internal clock signal iCK, the internal write enablesignal iWE, the internal read enable signal iRE and the internal datainput signal iDI for the memory circuit 410 based on the external clocksignal eCK, the external write enable signal eWE, the external readenable signal eRE, and the external data input signal eDI, and thememory circuit 410 generates the internal data output signal iDO for thelogic circuit 420 based on the internal clock signal iCK, the internalwrite enable signal iWE, the internal read enable signal iRE and theinternal data input signal iDI. Furthermore, the logic circuit 420generates the external data output signal eDO based on the internal dataoutput signal iDO. As described above, the both the memory circuit 410and the logic circuit 420 operate normally. Therefore, when the internaltest mode select signal iTMS is turned to the “L” level, the consumptioncurrent Iccn in the semiconductor integrated circuit 400 is equal to asum of the consumption current I1 in the memory circuit 410 and theconsumption current I2 in the logic circuit 420.

Next, the internal test mode select signal iTMS is turned to the “H”level by the logic circuit 420. On such an occasion as this, the outputnodes of the input switching circuit 417 and the internal outputterminal 416 of the memory circuit 410 are kept to have the highimpedances.

Then, the external clock signal eCK, the external write enable signaleWE, the external read enable signal eRE, and the external data inputsignal eDI, that are to be used when the semiconductor integratedcircuit 400 operates in the normal operational mode, are input to theexternal input terminals 431 through 434. In this instance, the logiccircuit 420 generates the internal clock signal iCK, the internal writeenable signal iWE, the internal read enable signal iRE and the internaldata input signal iDI for the memory circuit 410 based on the externalclock signal eCK, the external write enable signal eWE, the externalread enable signal eRE, and the external data input signal eDI. Also,when the internal test mode select signal iTMS is kept at the “H” level,the internal output terminal 416 of the memory circuit 410 is kept tohave the high impedance by the output switching circuit 418 and thepseudo test signal Spt is input to the pseudo test terminal 430.Therefore, the logic circuit 420 generates the external data outputsignal eDO based on the pseudo test signal Spt. Meanwhile, since theoutput nodes of the input switching circuit 417 are kept to have thehigh impedances, the memory circuit 410 is in a non-action mode. Thatis, when the internal test mode select signal iTMS is turned to the “H”level, the logic circuit 420 operates normally and the memory circuit410 is in the non-action mode. Therefore, the consumption current Icctin the semiconductor integrated circuit 400 is equal to the consumptioncurrent 12 in the logic circuit 420, when the internal test mode selectsignal iTMS is turned to the “H” level. As a result, the consumptioncurrent I1 in the memory circuit 410 can be obtained by a differencebetween the consumption current Iccn and the consumption current Icct.

According to the fourth preferred embodiment, the semiconductorintegrated circuit 400 includes the input switching circuit and theoutput switching circuit in the CUT (for example, the memory circuit)and further includes the pseudo test terminal in order to generate theexternal data output signal based on the pseudo test signal when the CUTis in the non-action mode. Therefore, the consumption current in the CUTcan be easily and exactly measured.

FIG. 11 is a schematic circuit diagram for describing a semiconductorintegrated circuit 500 according to a fifth preferred embodiment of thepresent invention. The semiconductor integrated circuit 500 measuresconsumption current in the memory circuit. The semiconductor integratedcircuit 500 includes a memory circuit 510, a logic circuit 520, a pseudotest terminal 530, a plurality of external input terminals 531 through534, an external output terminal 536, and a pseudo test signal switchingcircuit 540. In this example, the memory circuit 510 is the CUT.

The memory circuit 510 includes a plurality of internal input terminals511 through 515, an internal output terminal 516 and an input switchingcircuit 517 and an output switching circuit 518. Chiefly, theconfiguration of the logic circuit 520 according to the fifth preferredembodiment is different from the configuration of the logic circuit 420according to the fourth preferred embodiment. Furthermore, thesemiconductor integrated circuit 500 includes the pseudo test signalswitching circuit 540 unlikely with the semiconductor integrated circuit400 according to the fourth preferred embodiment. Each of the externalinput terminals 531 through 534 and the memory circuit 510 that includesthe internal input and output terminals 511 through 516 and the inputand output switching circuits 517 and 518 includes the sameconfiguration as each of the external input terminals 431 through 434and the memory circuit 410 that includes the internal input terminals411 through 415 and the input and output switching circuits 417 and 418in the fourth preferred embodiment.

The pseudo test signal switching circuit 540 is coupled to the pseudotest terminal 530 so as to receive the pseudo test signal Spt and to theinternal input terminal 515 of the memory circuit 510 so as to receivethe internal test mode select signal iTMS. The pseudo test terminal 530is also coupled to the logic circuit 520. That is, the pseudo testterminal 530 is used as an input-output terminal when the semiconductorintegrated circuit 500 operates in the normal operational mode. Also,the pseudo test signal switching circuit 540 is coupled to the internaloutput terminal 516 of the memory circuit 510. The pseudo test signalswitching circuit 540 provides the pseudo test signal Spt to theinternal output terminal 516 when the internal test mode select signaliTMS is turned to the “H” level. On the other hand, when the internaltest mode select signal iTMS is turned to the “L” level, the pseudo testsignal switching circuit 540 makes the internal output terminal 516 tohave the high impedance.

FIG. 12 is a schematic circuit diagram for describing the pseudo testsignal switching circuit 540 in the semiconductor integrated circuit 500in FIG. 11. As shown in FIG. 12, the pseudo test signal switchingcircuit 540 includes an inverter 540A, a PMOS transistor 540B and anNMOS transistor 540C. The inverter 540A includes an input node coupledto the internal input terminal 515 so as to receive the internal testmode select signal iTMS and then output an inverted internal test modeselect signal iTMSb. The PMOS transistor 540B includes a sourceelectrode coupled to the pseudo test terminal 530, a drain electrodecoupled to the internal output terminal 516 and a gate electrode coupledto an output node of the inverter 540A. The NMOS transistor 540Cincludes a drain electrode coupled to the pseudo test terminal 530, asource electrode coupled to internal output terminal 516 and a gateelectrode coupled to the internal input terminal 515.

The operation of the semiconductor integrated circuit 500 according tothe fifth preferred embodiment of the present invention is describedbelow. Before the consumption current in the memory circuit 510 ismeasured, the internal test mode select signal iTMS is turned to the “L”level by the logic circuit 520. On such an occasion as this, the inputswitching circuit 517 allows the inverted internal clock signal iCKb,the inverted internal write enable signal iWEb, the inverted internalread enable signal iREb and the inverted internal data input signal iDlbto be input to the internal of the memory circuit 510, and the outputswitching circuit 518 allows the internal data output signal iDO to beoutput from the memory circuit 510.

Then, the external clock signal eCK, the external write enable signaleWE, the external read enable signal eRE, and the external data inputsignal eDI, that are to be used when the semiconductor integratedcircuit 500 operates in the normal operational mode, are input to theexternal input terminals 531 through 534. At this point, the pseudo testterminal 530 is kept in a floating state. Accordingly, the logic circuit520 generates the internal clock signal iCK, the internal write enablesignal iWE, the internal read enable signal iRE and the internal datainput signal iDI for the memory circuit 510 based on the external clocksignal eCK, the external write enable signal eWE, the external readenable signal eRE, and the external data input signal eDI, and thememory circuit 510 generates the internal data output signal iDO for thelogic circuit 520 based on the internal clock signal iCK, the internalwrite enable signal iWE, the internal read enable signal iRE and theinternal data input signal iDI. Also, when the internal test mode selectsignal iTMS is kept at the “L” level, the PMOS transistor 540B and theNMOS transistor 540C of the pseudo test signal switching circuit 540 areturned OFF. Therefore, the logic circuit 520 generates the external dataoutput signal eDO based on the internal data output signal iDO. That is,the both the memory circuit 510 and the logic circuit 520 operatenormally. As a result, when the internal test mode select signal iTMS isturned to the “L” level, the consumption current Iccn in thesemiconductor integrated circuit 500 is equal to a sum of theconsumption current I1 in the memory circuit 510 and the consumptioncurrent I2 in the logic circuit 520.

Next, the internal test mode select signal iTMS is turned to the “H”level by the logic circuit 520. On such an occasion as this, the outputnodes of the input switching circuit 517 and the internal outputterminal 516 of the memory circuit 510 are kept to have the highimpedances.

Then, the external clock signal eCK, the external write enable signaleWE, the external read enable signal eRE, and the external data inputsignal eDI, that are to be used when the semiconductor integratedcircuit 500 operates in the normal operational mode, are input to theexternal input terminals 531 through 534. In this instance, the logiccircuit 520 generates the internal clock signal iCK, the internal writeenable signal iWE, the internal read enable signal iRE and the internaldata input signal iDI for the memory circuit 510 based on the externalclock signal eCK, the external write enable signal eWE, the externalread enable signal eRE, and the external data input signal eDI. Also,since the internal test mode select signal iTMS is kept at the “H”level, the internal output terminal 516 of the memory circuit 510 iskept to have the high impedance by the output switching circuit 518 andthe pseudo test signal Spt is input to the pseudo test terminal 530.Furthermore, when the internal test mode select signal iTMS is turned tothe “H” level, the PMOS transistor 540B and the NMOS transistor 540C inthe pseudo test signal switching circuit 540 are turned ON. Therefore,the logic circuit 520 generates the external data output signal eDObased on the pseudo test signal Spt.

Also, since the output nodes of the input switching circuit 517 are keptto have the high impedances, the memory circuit 510 is in a non-actionmode. That is, when the internal test mode select signal iTMS is turnedto the “H” level, the logic circuit 520 operates normally and the memorycircuit 510 is in the non-action mode. Therefore, the consumptioncurrent Icct in the semiconductor integrated circuit 500 is equal to theconsumption current 12 in the logic circuit 520, when the internal testmode select signal iTMS is turned to the “H” level. As a result, theconsumption current I1 in the memory circuit 510 can be obtained by adifference between the consumption current Iccn and the consumptioncurrent Icct.

According to the fifth preferred embodiment, the semiconductorintegrated circuit includes the input switching circuit and the outputswitching circuit in the CUT (for example, the memory circuit) andfurther includes the pseudo test signal switching circuit to generatethe external data output signal based on the pseudo test signal when theCUT is in the non-action mode. Therefore, the consumption current in theCUT can be easily and exactly measured. Also, since one input-outputterminal of the logic circuit is used as the pseudo test terminal thatreceives the pseudo test signal, it can be suppressed to increase thenumber of the terminals of the semiconductor integrated circuit for themeasurement of the consumption current in the CUT. Furthermore,according to the fifth preferred embodiment, since the semiconductorintegrated circuit includes the pseudo test signal switching circuit,the consumption current in the CUT can be measured even after assemblinga semiconductor device that includes the semiconductor integratedcircuit.

FIG. 13 is a schematic circuit diagram for describing a semiconductorintegrated circuit 600 according to a sixth preferred embodiment of thepresent invention. The semiconductor integrated circuit 600 measuresconsumption current in the memory circuit. The semiconductor integratedcircuit 600 includes a memory circuit 610, a logic circuit 620, aplurality of external input terminals 631 through 634, an externaloutput terminal 636, and a pseudo test signal generating circuit 640. Inthis example, the memory circuit 610 is the CUT.

The memory circuit 610 includes a plurality of internal input terminals611 through 615, an internal output terminal 616 and an input switchingcircuit 617 and an output switching circuit 618. The semiconductorintegrated circuit 600 includes the pseudo test signal generatingcircuit 640 unlikely with the semiconductor integrated circuit 400according to the fourth preferred embodiment. The other configurationsof the semiconductor integrated circuit 600 according to the sixthpreferred embodiment are the same as those according to the fourthpreferred embodiment.

The pseudo test signal generating circuit 640 is coupled to the internalinput terminal 614 so as to receive the internal data input signal iDIand to the internal input terminal 615 so as to receive the internaltest mode select signal iTMS. Also, the pseudo test signal generatingcircuit 640 is coupled to the internal output terminal 616 of the memorycircuit 610. The pseudo test signal generating circuit 640 provides thepseudo test signal Spt to the internal output terminal 616 of the memorycircuit 610 based on the internal data input signal iDI, when theinternal test mode select signal iTMS is turned to the “H” level. On theother hand, when the internal test mode select signal iTMS is turned tothe “L” level, the pseudo test signal generating circuit 640 makes theinternal output terminal 616 to have the high impedance.

FIG. 14 is a schematic circuit diagram for describing the pseudo testsignal generating circuit 640 in the semiconductor integrated circuit600 in FIG. 13. As shown in FIG. 14, the pseudo test signal generatingcircuit 640 includes first and second inverters 640A and 640B, first andsecond PMOS transistors 640C and 640D, and first and second NMOStransistors 640E and 640F.

The first inverter 640A includes an input node coupled to the internalinput terminal 615 so as to receive the internal test mode select signaliTMS and then output an inverted internal test mode select signal iTMSbthe second inverter 640B includes an input node coupled to the internalinput terminal 614 so as to receive the internal data input signal iDIand then outputs an inverted internal data input signal iDIb. The firstPMOS transistor 640C includes a source electrode coupled to the firstelectrical source terminal T1 and a gate electrode coupled to an outputnode of the first inverter 640A. The second PMOS transistor 640Dincludes a source electrode coupled to a drain electrode of the firstPMOS transistor 640C, a drain electrode coupled to the internal inputterminal 616 of the memory circuit 610, and a gate electrode coupled toan output node of the second inverter 640B. The first NMOS transistor640E includes a source electrode coupled to the second electrical sourceterminal T2 and a gate electrode coupled to the internal input terminal615 so as to receive the internal test mode select signal iTMS. The NMOStransistor 640F includes a source electrode coupled to a drain electrodeof the first NMOS transistor 640E, a drain electrode coupled to theinternal input terminal 616 of the memory circuit 610, and a gateelectrode coupled to the output node of the second inverter 640B.

The operation of the semiconductor integrated circuit 600 according tothe sixth preferred embodiment of the present invention is describedbelow. Before the consumption current in the memory circuit 610 ismeasured, the internal test mode select signal iTMS is turned to the “L”level by the logic circuit 620. On such an occasion as this, the inputswitching circuit 617 allows the inverted internal clock signal iCKb,the inverted internal write enable signal iWEb, the inverted internalread enable signal iREb and the inverted internal data input signal iDIbto be input to the memory circuit 610, and the output switching circuit618 allows the internal data output signal iDO to be output from thememory circuit 610.

Then, the external clock signal eCK, the external write enable signaleWE, the external read enable signal eRE, and the external data inputsignal eDI, that are to be used when the semiconductor integratedcircuit 600 operates in the normal operational mode, are input to theexternal input terminals 631 through 634. Accordingly, the logic circuit620 generates the internal clock signal iCK, the internal write enablesignal iWE, the internal read enable signal iRE and the internal datainput signal iDI for the memory circuit 610 based on the external clocksignal eCK, the external write enable signal eWE, the external readenable signal eRE, and the external data input signal eDI, and thememory circuit 610 generates the internal data output signal iDO for thelogic circuit 620 based on the internal clock signal iCK, the internalwrite enable signal iWE, the internal read enable signal iRE and theinternal data input signal iDI. Also, when the internal test mode selectsignal iTMS is kept at the “L” level, the first PMOS transistor 640C andthe first NMOS transistor 640E of the pseudo test signal generatingcircuit 640 are turned OFF. Therefore, the logic circuit 620 generatesthe external data output signal eDO based on the internal data outputsignal iDO. That is, the both the memory circuit 610 and the logiccircuit 620 operate normally. As a result, when the internal test modeselect signal iTMS is turned to the “L” level, the consumption currentIccn in the semiconductor integrated circuit 600 is equal to a sum ofthe consumption current 11 in the memory circuit 610 and the consumptioncurrent 12 in the logic circuit 620.

Next, the internal test mode select signal iTMS is turned to the “H”level by the logic circuit 620. On such an occasion as this, the outputnodes of the input switching circuit 617 and the internal outputterminal 616 of the memory circuit 610 are kept to have the highimpedances.

Then, the external clock signal eCK, the external write enable signaleWE, the external read enable signal eRE, and the external data inputsignal eDI, that are to be used when the semiconductor integratedcircuit 600 operates in the normal operational mode, are input to theexternal input terminals 631 through 634. In this instance, the logiccircuit 620 generates the internal clock signal iCK, the internal writeenable signal iWE, the internal read enable signal iRE and the internaldata input signal iDI for the memory circuit 610 based on the externalclock signal eCK, the external write enable signal eWE, the externalread enable signal eRE, and the external data input signal eDI. Also,since the internal test mode select signal iTMS is kept at the “H”level, the internal output terminal 616 of the memory circuit 610 iskept to have the high impedance by the output switching circuit 618.Furthermore, when the internal test mode select signal iTMS is turned tothe “H” level, the first PMOS transistor 640C and the first NMOStransistor 640E in the pseudo test signal generating circuit 640 areturned ON. Therefore, the pseudo test signal generating circuit 640provides the pseudo test signal Spt based on the internal data inputsignal iDI to the internal output terminal 616 of the memory circuit610.

Also, since the output nodes of the input switching circuit 617 are keptto have the high impedances, the memory circuit 610 is in a non-actionmode. That is, when the internal test mode select signal iTMS is turnedto the “H” level, the logic circuit 620 operates normally and the memorycircuit 610 is in the non-action mode. Therefore, the consumptioncurrent Icct in the semiconductor integrated circuit 600 is equal to theconsumption current 12 in the logic circuit 620, when the internal testmode select signal iTMS is turned to the “H” level. As a result, theconsumption current 11 in the memory circuit 610 can be obtained by adifference between the consumption current Iccn and the consumptioncurrent Icct.

According to the sixth preferred embodiment, the semiconductorintegrated circuit includes the input switching circuit and the outputswitching circuit in the CUT (for example, the memory circuit) andfurther includes the pseudo test signal generating circuit to generatethe pseudo test signal based on the internal data input signal when theCUT is in the non-action mode. Therefore, the consumption current in theCUT can be easily and exactly measured. Also, since the internal datainput signal is used for generating the pseudo test signal, it can besuppressed to increase the number of the terminals of the semiconductorintegrated circuit for the measurement of the consumption current in theCUT. Furthermore, according to the sixth preferred embodiment, since thesemiconductor integrated circuit includes the pseudo test signalgenerating circuit, the consumption current in the CUT can be measuredeven after assembling a semiconductor device that includes thesemiconductor integrated circuit.

1. A semiconductor integrated circuit, comprising: a first electricalsource terminal which receives a first electrical source voltage; asecond electrical source terminal which receives a second electricalsource voltage lower than the first electrical source voltage; aplurality of external input terminals which receives a plurality ofexternal test signals; a logic circuit, coupled to the external inputterminals, which outputs a plurality of internal test signals based onthe external test signals; a circuit under test (CUT), coupled to thelogic circuit, which receives the internal test signals; a delay timemeasurement terminal from which a delay time measurement signal isoutput, wherein the delay time measurement signal is turned inaccordance with a transition of one of the internal test signals; acurrent generator coupled between the first electrical source terminaland the delay time measurement terminal; and a plurality of delay timemeasurement transistors which are coupled in parallel between the delaytime measurement terminal and the second electrical source terminal andwhich have a plurality of control electrodes, wherein the controlelectrodes of the delay time measurement transistors are coupled to thelogic circuit to receive the internal test signals.
 2. The semiconductorintegrated circuit according to claim 1, wherein the delay timemeasurement terminal is a first delay time measurement terminal, thedelay time measurement signal is a first delay time measurement signal,the constant-current circuit is a first constant-current circuit and thedelay time measurement transistors are first delay time measurementtransistors, wherein the CUT provides an internal test output signal tothe logic circuit, wherein the logic circuit generates a test resultoutput signal based on the internal test output signal, and wherein thesemiconductor integrated circuit further comprises: a first delay timeapproximation transistor which is coupled between the first delay timemeasurement terminal and the second electrical source terminal and whichis controlled by a test control signal; a second delay time measurementterminal from which a second delay time measurement signal is output; asecond constant-current circuit coupled between the first electricalsource terminal and the second delay time measurement terminal; a seconddelay measurement transistor which is coupled between the second delaytime measurement terminal and the second electrical source terminal andwhich is controlled by the internal test output signal; and a seconddelay time approximation transistor which is coupled between the seconddelay time measurement terminal and the second electrical sourceterminal and which is controlled by the test control signal.
 3. Thesemiconductor integrated circuit according to claim 2, wherein a delaytime between the internal test signal and the first delay timemeasurement signal approximates a delay time between the test controlsignal and the first delay time measurement signal, and wherein a delaytime between the internal test output signal and the test result outputsignal approximates a delay time between the test control signal and thesecond delay time measurement signal.
 4. The semiconductor integratedcircuit according to claim 1, further comprising: a switching circuitcoupled between the delay time measurement terminal and the delay timemeasurement transistors, wherein the switching circuit is controlled bya test mode select signal.
 5. The semiconductor integrated circuitaccording to claim 4, wherein the delay time measurement terminal iscoupled to the logic circuit.
 6. The semiconductor integrated circuitaccording to claim 4, wherein the switching circuit is an NMOStransistor having a gate electrode which receives the test mode selectsignal.
 7. The semiconductor integrated circuit according to claim 1,wherein the CUT is a memory circuit.
 8. The semiconductor integratedcircuit according to claim 1, wherein the first electrical sourcevoltage is a power supply voltage and the second electrical sourcevoltage is a ground voltage.
 9. A semiconductor integrated circuit,operable normal operational mode and a test mode, comprising: aplurality of external input terminals which receives a plurality ofexternal signals; a logic circuit coupled to the external inputterminals, wherein the logic circuit outputs a plurality of internalinput signals based on the external signals; a circuit under test (CUT)coupled to the logic circuit to receive the internal input signals,wherein the CUT generates an internal output signal for the logiccircuit when the semiconductor integrated circuit operates in the normaloperational mode; an input switching circuit coupled between the logiccircuit and the CUT, wherein the input switching circuit prohibits theCUT from receiving the internal input signals when the semiconductorintegrated circuit operates in the test mode; a pseudo test terminalcoupled to the CUT and the logic circuit, wherein a pseudo test signalis input to the logic circuit through the pseudo test terminal when theCUT is prohibited from receiving the internal input signals.
 10. Thesemiconductor integrated circuit according to claim 9, wherein thepseudo test signal corresponds to the internal output signal that isgenerated from the CUT during the normal operational of thesemiconductor integrated circuit.
 11. The semiconductor integratedcircuit according to claim 9, wherein the input switching circuit allowsthe internal input signals to pass through the CUT during the normaloperational of the semiconductor integrated circuit.
 12. Thesemiconductor integrated circuit according to claim 11, furthercomprising: an output switching circuit coupled between the CUT and thelogic circuit, wherein the output switching circuit generates theinternal output signal for the logic circuit during the normaloperational of the semiconductor integrated circuit.
 13. Thesemiconductor integrated circuit according to claim 9, wherein one ofthe internal input signals is a test mode select signal which causes thesemiconductor integrated circuit to operate in the test mode, andwherein the semiconductor integrated circuit further comprises: a pseudotest signal switching circuit, coupled between the internal output nodeand the pseudo test terminal, which is controlled by the test modeselect signal.
 14. The semiconductor integrated circuit according toclaim 13, wherein the pseudo test signal switching circuit includes aPMOS transistor and an NMOS transistor coupled together in parallelbetween the internal output node and the pseudo test terminal, andwherein the PMOS and NMOS transistor are controlled by the test modeselect signal.
 15. The semiconductor integrated circuit according toclaim 9, wherein the CUT is a memory circuit.
 16. A semiconductorintegrated circuit, operable a normal operational mode and a test mode,comprising: a plurality of external input terminals which receives aplurality of external signals; a logic circuit coupled to the externalinput terminals, wherein the logic circuit outputs a plurality ofinternal input signals based on the external signals, the internalsignals including a data input signal; a circuit under test (CUT)coupled to the logic circuit to receive the internal input signals,wherein the CUT generates an internal output signal for the logiccircuit when the semiconductor integrated circuit operates in the normaloperational mode; an input switching circuit coupled between the logiccircuit and the CUT, wherein the input switching circuit prohibits theCUT from receiving the internal input signals when the semiconductorintegrated circuit operates in the test mode; a pseudo test signalgenerating circuit coupled to the logic circuit to receive the datainput signal, wherein the pseudo test signal generating circuit providesa pseudo test signal to the logic circuit based on the data inputsignal, when the CUT is prohibited from receiving the internal inputsignals.
 17. The semiconductor integrated circuit according to claim 16,wherein the pseudo test signal corresponds to the internal output signalthat is generated from the CUT during the normal operational of thesemiconductor integrated circuit.
 18. The semiconductor integratedcircuit according to claim 16, wherein the internal input signalsinclude a test mode select signal which causes the semiconductorintegrated circuit to operate in the test mode, and wherein the pseudotest signal generating circuit is controlled by the test mode selectsignal.
 19. The semiconductor integrated circuit according to claim 18,wherein the pseudo test signal generating circuit includes: a firstelectrical source terminal which receives a first electrical sourcevoltage; a second electrical source terminal which receives a secondelectrical source voltage lower than the first electrical sourcevoltage; first and second PMOS transistors coupled in series between thefirst electrical source terminal and the internal output node, thesecond PMOS transistor being coupled with the internal node; first andsecond NMOS transistors coupled in series between the internal outputnode and the second electrical source terminal, the second NMOStransistor being coupled with the internal node; and an inverter,coupled to gate electrodes of the second PMOS transistor and the secondNMOS transistor, which generates an inverted signal of the data inputsignal; wherein the first PMOS transistor and the first NMOS transistorare controlled by the test mode select signal.
 20. The semiconductorintegrated circuit according to claim 16, wherein the CUT is a memorycircuit.